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1 Calculation of intrinsic stresses in the diamond-like coatings produced by plasma ion deposition in modes of DC and pulse bias potentials [会议论文]

作者:Kalinichenko, A.A.^1, Perepelkin, S.S.^1, Strel'Nitskij, V.E.^1

关键词:Criterion of applicability;Defects formation;...

会议举办机构:National Science Center, Kharkov Institute of Physics and Technology, 1 Akademicheskaya Str., Kharkov

会议时间:2015

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